Rutherford Backscattering Spectrometry (RBS)
نویسنده
چکیده
Rutherford Backscattering Spectrometry (RBS) is a widely used method for the surface layer analysis of solids. This lecture gives a brief introduction into the method, and describes scattering kinematics, scattering cross-section data, stopping power data, detector resolution issues, and electronic energy loss straggling in some detail. Computer codes for the simulation of RBS spectra and RBS data analysis are presented, and supply sources of codes and cross-section data are given. Practical applications of RBS and RBS data analysis are demonstrated in some examples.
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